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SiH4

Name: SiH4
Rating: 5.0 (27 reviews)

SiH₄

CAS No.: 7803-62-5
UN No.: 2203
EINECS No.: 232-263-4
Molecular weight: 32.117
Appearance: Colorless, Garlic smell
Melting point: -185 ℃
Boiling point: -112 ℃
Density: 1.34 kg/m³
DOT Class: 2.1
Label: Flammable gas

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Product Description

Packing Specifications

Type of Cylinder		Content
Capacity	Valve	Weight
47L	DISS632	12KG
440L	DISS632	120KG

Electronic SiH₄ 99.9999%

Specification	99.9999%
CO	≤ 0.05 ppm
CO₂	≤ 0.05 ppm
Total Cl	≤ 0.1 ppm
CH₄	≤ 0.05 ppm
C2-C4	≤ 0.1 ppm
N₂	≤ 0.5 ppm
O₂	≤ 0.05 ppm
Moisture	≤ 0.1 ppm
Silyl Ether	≤ 0.1 ppm
Methylsilane	≤ 0.1 ppm
Disilane	≤ 0.3 ppm
H₂	≤ 20 ppm
Al	≤ 0.02 ppba
Sb	≤ 0.02 ppba
As	≤ 0.02 ppba
Ga	≤ 0.02 ppba
B	≤ 0.02 ppba
P	≤ 0.02 ppba
Fe+Cr+Ni+Cu+Zn	≤ 1 ppba

SiH4

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