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Quantity: | |
Packing Specifications
Type of Cylinder | Content | |
Capacity | Valve | Weight |
10L | DISS640 | 4KG |
47L | DISS640 | 20KG |
440L | DISS640 | 195KG |
Electronic NF3 99.99%
Specification | 99.99% |
CF4 | ≤ 40 ppm |
N2 | ≤ 10 ppm |
O2+Ar | ≤ 5 ppm |
CO | ≤ 1 ppm |
CO2 | ≤ 3 ppm |
N2O | ≤ 3 ppm |
SF6 | ≤ 3 ppm |
Moisture | ≤ 1 ppm |
HF | ≤ 1 ppm |
Electronic NF3 99.996%
Specification | 99.996% |
CF4 | ≤ 20 ppm |
N2 | ≤ 5 ppm |
O2+Ar | ≤ 3 ppm |
CO | ≤ 1 ppm |
CO2 | ≤ 0.5 ppm |
N2O | ≤ 1 ppm |
SF6 | ≤ 2 ppm |
Moisture | ≤ 1 ppm |
HF | ≤ 1 ppm |
Packing Specifications
Type of Cylinder | Content | |
Capacity | Valve | Weight |
10L | DISS640 | 4KG |
47L | DISS640 | 20KG |
440L | DISS640 | 195KG |
Electronic NF3 99.99%
Specification | 99.99% |
CF4 | ≤ 40 ppm |
N2 | ≤ 10 ppm |
O2+Ar | ≤ 5 ppm |
CO | ≤ 1 ppm |
CO2 | ≤ 3 ppm |
N2O | ≤ 3 ppm |
SF6 | ≤ 3 ppm |
Moisture | ≤ 1 ppm |
HF | ≤ 1 ppm |
Electronic NF3 99.996%
Specification | 99.996% |
CF4 | ≤ 20 ppm |
N2 | ≤ 5 ppm |
O2+Ar | ≤ 3 ppm |
CO | ≤ 1 ppm |
CO2 | ≤ 0.5 ppm |
N2O | ≤ 1 ppm |
SF6 | ≤ 2 ppm |
Moisture | ≤ 1 ppm |
HF | ≤ 1 ppm |
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