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NF3

NF3

CAS No.: 7783-54-2
UN No.: 2451
EINECS No.: 7783-54-2
Molecular weight: 71.0019
Appearance: Colorless,Odorless
Melting point: -206.79 ℃
Boiling point: -129.0 ℃
Density: 2.96 kg/m³
DOT Class: 2.2 & 5.1
Label: Non-flammable gas,Oxidants
Availability:
Quantity:

Packing Specifications


Type of Cylinder

Content

Capacity

Valve

Weight

10L

DISS640

4KG

47L

DISS640

20KG

440L

DISS640

195KG


Electronic NF3 99.99%


Specification

99.99%

CF4

≤ 40 ppm

N2

≤ 10 ppm

O2+Ar

≤ 5 ppm

CO

≤ 1 ppm

CO2

≤ 3 ppm

N2O

≤ 3 ppm

SF6

≤ 3 ppm

Moisture

≤ 1 ppm

HF

≤ 1 ppm


Electronic NF3 99.996%


Specification

99.996%

CF4

≤ 20 ppm

N2

≤ 5 ppm

O2+Ar

≤ 3 ppm

CO

≤ 1 ppm

CO2

≤ 0.5 ppm

N2O

≤ 1 ppm

SF6

≤ 2 ppm

Moisture

≤ 1 ppm

HF

≤ 1 ppm



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