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CF4

CF4

CAS No.: 75-73-0
UN No.: 1982
EINECS No.: 200-896-5
Molecular weight: 88
Appearance: Colorless，Odorless
Melting point: -184 ℃
Boiling point: -128.1 ℃
Density: 3.72 kg/m³
DOT Class: 2.2
Label: Non-flammable gas
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Packing Specifications


Type of Cylinder

Content

Capacity

Valve

Weight

47L

CGA580

30KG


Electronic CF4 99.999%


Specification

99.999%

O2+Ar

≤ 1 ppm

N2

≤ 2 ppm

H2

≤ 0.3 ppm

CO

≤ 0.3 ppm

CO2

≤ 0.3 ppm

SF6

≤ 0.3 ppm

THC

≤ 0.3 ppm

CHF3

≤ 0.3 ppm

OFC

≤ 1 ppm

Moisture

≤ 1 ppm

HF

≤ 0.1 ppm


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