SiH4

Capacity

Valve

Weight

47L

DISS632

12KG

440L

DISS632

120KG

CO

≤ 0.05 ppm

CO₂

≤ 0.05 ppm

Total Cl

≤ 0.1 ppm

CH₄

≤ 0.05 ppm

C2-C4

≤ 0.1 ppm

N₂

≤ 0.5 ppm

O₂

≤ 0.05 ppm

Moisture

≤ 0.1 ppm

Silyl Ether

≤ 0.1 ppm

Methylsilane

≤ 0.1 ppm

Disilane

≤ 0.3 ppm

H₂

≤ 20 ppm

Al

≤ 0.02 ppba

Sb

≤ 0.02 ppba

As

≤ 0.02 ppba

Ga

≤ 0.02 ppba

B

≤ 0.02 ppba

P

≤ 0.02 ppba

Fe+Cr+Ni+Cu+Zn

≤ 1 ppba