Packing Specifications
Type of Cylinder
Content
Capacity
Valve
Weight
40L
CGA580
35KG
47L
40KG
Electronic C4F8 99.999%
Specification
99.999%
O2+Ar
≤ 1 ppm
N2
≤ 2 ppm
H2
≤ 0.5ppm
CO
≤ 0.5 ppm
CO2
CH4
OHC
Moisture
≤ 3 ppm
HF
≤ 0.1 ppm
PRODUCT INQUIRY
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