BCl3

Capacity

Valve

Weight

47L

CGA660

50KG

Cl₂

≤ 10 ppm

SiCl₄

≤ 300 ppm

O₂

≤ 1 ppm

N₂

≤ 4 ppm

CO

≤ 0.5 ppm

CO₂

≤ 2 ppm

CH₄

≤ 0.5 ppm

Phosgene

≤ 1 ppm

O₂

≤ 0.5 ppm

N₂

≤ 1 ppm

CH₄

≤ 0.5 ppm

CO

≤ 0.6 ppm

CO₂

≤ 1 ppm

HCl

≤ 1 ppm

Cl₂

≤ 1 ppm

SiCl₄

≤ 2 ppm

Phosgene

≤ 1 ppm

The above concentrations (% or ppm) are expressed in gas phase and are calculated by volume.

Al

≤ 10 ppb

Ca

≤ 10 ppb

Cr

≤ 10 ppb

Cu

≤ 10 ppb

Fe

≤ 30 ppb

K

≤ 20 ppb

Mg

≤ 10 ppb

Mn

≤ 10 ppb

Na

≤ 10 ppb

Ni

≤ 10 ppb

Zn

≤ 10 ppb

As

≤ 20 ppb

Si

≤ 10 ppb

Ba

≤ 10 ppb

Sb

≤ 10 ppb

Ag

≤ 100 ppb

Li

≤ 10 ppb

Pb

≤ 10 ppb

Au

≤ 100 ppb

The above concentration (ppb) is expressed as liquid phase, calculated by weight