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NF3

Product Description

Packing Specifications

Type of Cylinder		Content
Capacity	Valve	Weight
10L	DISS640	4KG
47L	DISS640	20KG
440L	DISS640	195KG

Electronic NF₃ 99.99%

Specification	99.99%
CF₄	≤ 40 ppm
N₂	≤ 10 ppm
O₂+Ar	≤ 5 ppm
CO	≤ 1 ppm
CO₂	≤ 3 ppm
N₂O	≤ 3 ppm
SF₆	≤ 3 ppm
Moisture	≤ 1 ppm
HF	≤ 1 ppm

Electronic NF₃ 99.996%

Specification	99.996%
CF₄	≤ 20 ppm
N₂	≤ 5 ppm
O₂+Ar	≤ 3 ppm
CO	≤ 1 ppm
CO₂	≤ 0.5 ppm
N₂O	≤ 1 ppm
SF₆	≤ 2 ppm
Moisture	≤ 1 ppm
HF	≤ 1 ppm

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