CF4

Capacity

Valve

Weight

47L

CGA580

30KG

O₂+Ar

≤ 1 ppm

N₂

≤ 2 ppm

H₂

≤ 0.3 ppm

CO

≤ 0.3 ppm

CO₂

≤ 0.3 ppm

SF₆

≤ 0.3 ppm

THC

≤ 0.3 ppm

CHF₃

≤ 0.3 ppm

OFC

≤ 1 ppm

Moisture

≤ 1 ppm

HF

≤ 0.1 ppm