Packing Specifications
Type of Cylinder
Content
Capacity
Valve
Weight
40L
CGA 590/QF-2
50KG
47L
58KG
50L
62KG
500L
625KG
Industrial SF6 99.995%
Specification
≥99.995%
Air
≤ 10 ppm
CF₄
≤ 2 ppm
C2F6
≤ 20 ppm
C3F8
≤ 5 ppm
Low sulfide
Not Detected
Moisture
≤ 1 ppm
HF
≤ 0.1 ppm
Hydrofluoric acid hydrolysis of fluoride
≤ 0.3 ppm
Mineral oil
Electronic SF6 99.999%
≥99.999%
O2+Ar
N2
CH4
CO
≤ 0.5 ppm
CF4
CO2
≤ 3 ppm
≤ 0.8 ppm
PRODUCT INQUIRY
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